Следене
Terunobu Akiyama
Terunobu Akiyama
Потвърден имейл адрес: epfl.ch
Заглавие
Позовавания
Позовавания
Година
Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
T Akiyama, D Collard, H Fujita
Journal of Microelectromechanical systems 6 (1), 10-17, 1997
2741997
Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
T Akiyama, D Collard, H Fujita
Journal of Microelectromechanical systems 6 (1), 10-17, 1997
2741997
Controlled stepwise motion in polysilicon microstructures
T Akiyama, K Shono
Journal of Microelectromechanical Systems 2 (3), 106-110, 1993
2451993
Nanomechanical membrane-type surface stress sensor
G Yoshikawa, T Akiyama, S Gautsch, P Vettiger, H Rohrer
Nano letters 11 (3), 1044-1048, 2011
1792011
A quantitative analysis of scratch drive actuator using buckling motion
T Akiyama, H Fujita
IEEE Proc. Int. Conf. Micro Electro Mechanical Systems, 310-315, 1995
901995
Two dimensional array of piezoresistive nanomechanical membrane-type surface stress sensor (MSS) with improved sensitivity
G Yoshikawa, T Akiyama, F Loizeau, K Shiba, S Gautsch, T Nakayama, ...
Sensors 12 (11), 15873-15887, 2012
872012
Atomic force bio-analytics
P Frederix, T Akiyama, U Staufer, C Gerber, D Fotiadis, DJ Müller, A Engel
Current opinion in chemical biology 7 (5), 641-647, 2003
822003
Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy
T Akiyama, U Staufer, NF De Rooij, P Frederix, A Engel
Review of scientific instruments 74 (1), 112-117, 2003
812003
Conductive supports for combined AFM–SECM on biological membranes
PLTM Frederix, PD Bosshart, T Akiyama, M Chami, MR Gullo, ...
Nanotechnology 19 (38), 384004, 2008
782008
Nanoscale dispensing of liquids through cantilevered probes
A Meister, S Jeney, M Liley, T Akiyama, U Staufer, NF De Rooij, ...
Microelectronic engineering 67, 644-650, 2003
782003
Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal …
T Akiyama, U Staufer, NF De Rooij, D Lange, C Hagleitner, O Brand, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
732000
Microactuated self-assembling of 3D polysilicon structures with reshaping technology
Y Fukuta, D Collard, T Akiyama, EH Yang, H Fujita
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
731997
Assessment of insulated conductive cantilevers for biology and electrochemistry
PLTM Frederix, MR Gullo, T Akiyama, A Tonin, NF De Rooij, U Staufer, ...
Nanotechnology 16 (8), 997, 2005
722005
Characterization of microfabricated probes for combined atomic force and high-resolution scanning electrochemical microscopy
MR Gullo, PLTM Frederix, T Akiyama, A Engel, NF deRooij, U Staufer
Analytical chemistry 78 (15), 5436-5442, 2006
702006
Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
G Yoshikawa, HP Lang, T Akiyama, L Aeschimann, U Staufer, P Vettiger, ...
Nanotechnology 20 (1), 015501, 2008
652008
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
602006
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
602006
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
602006
Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
T Akiyama, D Briand, NF De Rooij
Journal of Micromechanics and Microengineering 22 (8), 085034, 2012
482012
A quantitative analysis of scratch drive actuation for integrated X/Y motion system
P Langlet, D Collard, T Akiyama, H Fujita
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
451997
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