Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum … JT Gaskins, PE Hopkins, DR Merrill, SR Bauers, E Hadland, DC Johnson, ...
ECS Journal of Solid State Science and Technology 6 (10), N189, 2017
114 2017 L {sub g}= 100 nm In {sub 0.7} Ga {sub 0.3} As quantum well metal-oxide semiconductor field-effect transistors with atomic layer deposited beryllium oxide as interfacial layer HM Kwon, D Veksler, D Gilmer, PD Kirsch, DH Kim, TW Hudnall, ...
Applied Physics Letters 104 (16), 2014
61 2014 Sub-100 nm InGaAs quantum-well (QW) tri-gate MOSFETs with Al2 O3 /HfO2 (EOT < 1 nm) for low-power logic applications TW Kim, DH Kim, DH Koh, HM Kwon, RH Baek, D Veksler, C Huffman, ...
2013 IEEE International Electron Devices Meeting, 16.3. 1-16.3. 4, 2013
43 2013 ETB-QW InAs MOSFET with scaled body for improved electrostatics TW Kim, DH Kim, DH Koh, RJW Hill, RTP Lee, MH Wong, T Cunningham, ...
2012 International Electron Devices Meeting, 32.3. 1-32.3. 4, 2012
41 2012 L -nm Trigate Quantum-Well In0.53 Ga0.47 As Metal–Oxide–Semiconductor Field-Effect Transistors With Al2 O3 /HfO2 Gate-Stack TW Kim, DH Koh, CS Shin, WK Park, T Orzali, C Hobbs, WP Maszara, ...
IEEE Electron Device Letters 36 (3), 223-225, 2015
35 2015 Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications D Koh, JH Yum, SK Banerjee, TW Hudnall, C Bielawski, WA Lanford, ...
Journal of Vacuum Science & Technology B 32 (3), 2014
31 2014 X-ray photoelectron spectroscopy investigation of the valence band offset at beryllium oxide-diamond interfaces D Koh, SK Banerjee, J Brockman, M Kuhn, SW King
Diamond and Related Materials 101, 107647, 2020
13 2020 Sub-100 nm regrown S/D Gate-Last In0.7 Ga0.3 As QW MOSFETs with μn,eff > 5,500 cm2 /V-s CS Shin, WK Park, SH Shin, YD Cho, DH Ko, TW Kim, DH Koh, HM Kwon, ...
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical …, 2014
11 2014 A novel technique exploiting C–V, G–V and I–V simulations to investigate defect distribution and native oxide in high-κ dielectrics for III–V MOSFETs G Sereni, L Larcher, L Vandelli, D Veksler, T Kim, D Koh, G Bersuker
Microelectronic Engineering 147, 281-284, 2015
8 2015 Damage free Ar ion plasma surface treatment on In0. 53Ga0. 47As-on-silicon metal-oxide-semiconductor device D Koh, SH Shin, J Ahn, S Sonde, HM Kwon, T Orzali, DH Kim, TW Kim, ...
Applied Physics Letters 107 (18), 2015
6 2015 In0. 7Ga0. 3As quantum well MOSFETs with Al2O3/HfO2 toward subthreshold swing of∼ 60 mV/dec TW Kim, D Koh, H Kwon, CS Shin, WK Park, SH Shin, Y Cho, DH Ko, ...
Applied Physics Express 7 (7), 074201, 2014
5 2014 Valence and conduction band offsets at beryllium oxide interfaces with silicon carbide and III-V nitrides D Koh, SK Banerjee, C Locke, SE Saddow, J Brockman, M Kuhn, ...
Journal of Vacuum Science & Technology B 37 (4), 2019
4 2019 Nanoscale doping of compound semiconductors by solid phase dopant diffusion J Ahn, H Chou, D Koh, T Kim, A Roy, J Song, SK Banerjee
Applied Physics Letters 108 (12), 2016
3 2016 Novel atomic layer deposited thin film beryllium oxide for InGaAs MOS Devices D Koh, JH Yum, T Akyol, DA Ferrer, M Lei, TW Hudnall, MC Downer, ...
2012 International Conference on Indium Phosphide and Related Materials, 163-166, 2012
2 2012 Lg= 100 nm In0. 7Ga0. 3As quantum well metal-oxide semiconductor field-effect transistors with atomic layer deposited beryllium oxide as interfacial layer D Koh, HM Kwon, TW Kim, DH Kim, TW Hudnall, CW Bielawski, ...
Applied Physics Letters 104 (16), 2014
1 2014 X-Ray Photoemission Investigation of the Beryllium Oxide Band Alignment with Magnesium Oxide and Estimates for Other Insulating and Conducting Oxides D Koh, TW Hudnall, CW Bielawski, S Banerjee, J Brockman, M Kuhn, ...
ECS Transactions 102 (3), 127, 2021
2021 X-ray photoelectron spectroscopy investigation of the valence band offset at beryllium oxide-diamond interfaces (vol 101, 107647, 2020) D Koh, TW Hudnall, CW Bielawski, SK Banerjee, J Brockman, M Kuhn, ...
DIAMOND AND RELATED MATERIALS 111, 2021
2021 Corrigendum to" X-ray photoelectron spectroscopy investigation of the valence band offset at beryllium oxide-diamond interfaces"[Diam. Relat. Mater. 101 (2020) 107647-7] D Koh, TW Hudnall, CW Bielawski, SK Banerjee, J Brockman, M Kuhn, ...
Diamond & Related Materials 111, 108217, 2021
2021 Valence and conduction band offsets at beryllium oxide interfaces with silicon carbide and III-V nitrides (vol 37, 041206, 2019) D Koh, SK Banerjee, C Locke, SE Saddow, J Brockman, M Kuhn, ...
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 38 (3), 2020
2020 Erratum:“Valence and conduction band offsets at beryllium oxide interfaces with silicon carbide and III-V nitrides”[J. Vac. Sci. Technol. B 37, 041206 (2019)] D Koh, SK Banerjee, C Locke, SE Saddow, J Brockman, M Kuhn, ...
Journal of Vacuum Science & Technology B 38 (3), 2020
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