Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, XP Qu, ...
Semiconductor Science and Technology 27 (7), 074012, 2012
178 2012 Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface D Longrie, S Deng, JW Maes
US Patent 11,450,529, 2022
87 2022 Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ...
Microelectronic Engineering 86 (4-6), 1238-1242, 2009
51 2009 Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates S Deng, SW Verbruggen, Z He, DJ Cott, PM Vereecken, JA Martens, ...
RSC advances 4 (23), 11648-11653, 2014
49 2014 Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteries S Moitzheim, CS Nimisha, S Deng, DJ Cott, C Detavernier, PM Vereecken
Nanotechnology 25 (50), 504008, 2014
45 2014 Air-based photoelectrochemical cell capturing water molecules from ambient air for hydrogen production J Rongé, S Deng, SP Sree, T Bosserez, SW Verbruggen, NK Singh, ...
RSC advances 4 (55), 29286-29290, 2014
40 2014 Selective passivation and selective deposition EE Tois, SP Haukka, RH Matero, E Färm, D Longrie, H Suemori, JW Maes, ...
US Patent 11,094,535, 2021
37 2021 Photocatalytic acetaldehyde oxidation in air using spacious TiO2 films prepared by atomic layer deposition on supported carbonaceous sacrificial templates SW Verbruggen, S Deng, M Kurttepeli, DJ Cott, PM Vereecken, S Bals, ...
Applied Catalysis B: Environmental 160, 204-210, 2014
36 2014 Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices S Deng, Q Xie, D Deduytsche, M Schaekers, D Lin, M Caymax, A Delabie, ...
Applied Physics Letters 99 (5), 052906, 2011
32 2011 Heterogeneous TiO2 /V2 O5 /Carbon Nanotube Electrodes for Lithium-Ion Batteries M Kurttepeli, S Deng, F Mattelaer, DJ Cott, P Vereecken, J Dendooven, ...
ACS Applied Materials & Interfaces 9 (9), 8055-8064, 2017
29 2017 Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination S Deng, M Kurttepeli, DJ Cott, S Bals, C Detavernier
Journal of Materials Chemistry A 3 (6), 2642-2649, 2015
29 2015 Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications C Gao, ZC Xu, SR Deng, J Wan, Y Chen, R Liu, E Huq, XP Qu
Microelectronic engineering 88 (8), 2100-2104, 2011
28 2011 Cu adhesion on tantalum and ruthenium surface: Density functional theory study SF Ding, SR Deng, HS Lu, YL Jiang, GP Ru, DW Zhang, XP Qu
Journal of Applied Physics 107 (10), 103534, 2010
27 2010 Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO 2 deposited using atomic … SP Sree, J Dendooven, K Masschaele, HM Hamed, S Deng, S Bals, ...
Nanoscale 5 (11), 5001-5008, 2013
26 2013 22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching C Gao, SR Deng, J Wan, BR Lu, R Liu, E Huq, XP Qu, Y Chen
Microelectronic engineering 87 (5-8), 927-930, 2010
25 2010 Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing S Deng, SW Verbruggen, S Lenaerts, JA Martens, S Van den Berghe, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 32 (1 …, 2014
20 2014 High-Performance Ge MOS Capacitors by Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, Y Jiang, X Qu, ...
IEEE electron device letters 32 (12), 1656-1658, 2011
17 2011 Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template S Deng, M Kurttepeli, S Deheryan, DJ Cott, PM Vereecken, JA Martens, ...
Nanoscale 6 (12), 6939-6944, 2014
16 2014 Selective passivation and selective deposition JWH Maes, ME Givens, SP Haukka, V Paruchuri, IJ Raaijmakers, S Deng, ...
US Patent 11,145,506, 2021
13 2021 Synthesis and Characterization of Photoreactive TiO2 –Carbon Nanosheet Composites M Kurttepeli, S Deng, SW Verbruggen, G Guzzinati, DJ Cott, S Lenaerts, ...
The Journal of Physical Chemistry C 118 (36), 21031-21037, 2014
11 2014 
jing wanFudan University (M.S) --> IMEP-LAHC (Ph.D.) --> Globalfoundries (Sr. Eng.)->Fudan University(Prof.)
