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Yuan Lu
Yuan Lu
Regional Manager Technical Marketing, Evatec AG
Verified email at evatecnet.com
Title
Cited by
Cited by
Year
Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x = 0.41) thin films
Y Lu, M Reusch, N Kurz, A Ding, T Christoph, M Prescher, L Kirste, ...
APL Materials 6 (7), 076105, 2018
992018
Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
N Kurz, A Ding, DF Urban, Y Lu, L Kirste, NM Feil, A Žukauskaitė, ...
Journal of Applied Physics 126 (7), 2019
822019
Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Y Lu, M Reusch, N Kurz, A Ding, T Christoph, L Kirste, V Lebedev, ...
physica status solidi (a) 215 (9), 1700559, 2018
722018
Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
M Baeumler, Y Lu, N Kurz, L Kirste, M Prescher, T Christoph, J Wagner, ...
Journal of Applied Physics 126, 045715, 2019
602019
Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
M Reusch, S Cherneva, Y Lu, A Žukauskaitė, L Kirste, K Holc, M Datcheva, ...
Applied Surface Science 407, 307-314, 2017
462017
Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0. 77Sc0. 23N 112¯ thin films
A Ding, L Kirste, Y Lu, R Driad, N Kurz, V Lebedev, T Christoph, NM Feil, ...
Applied Physics Letters 116 (10), 2020
352020
Temperature dependence of the pyroelectric coefficient of AlScN thin films
N Kurz, Y Lu, L Kirste, M Reusch, A Žukauskaitė, V Lebedev, O Ambacher
physica status solidi (a) 215 (13), 1700831, 2018
352018
Thermal and phase-separation behavior of injection-molded poly(l-lactic acid)/poly(d-lactic acid) blends with moderate optical purity
H Xu, S Tang, J Chen, P Yin, W Pu, Y Lu
Polymer bulletin 68, 1135-1151, 2012
212012
High quality co-sputtering alscn thin films for piezoelectric lamb-wave resonators
S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu
Journal of Microelectromechanical Systems 31 (3), 328-337, 2022
202022
Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines
S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu
IEEE Electron Device Letters 43 (4), 647-650, 2022
172022
Development and characterization of piezoelectric AlScN-based alloys for electroacoustic applications
Y Lu
University of Freiburg, 2019
132019
Al0. 7Sc0. 3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2· Qm) over 146
Z Luo, S Shao, K Liu, Y Lu, A Mazzalai, C Tosi, T Wu
Applied Physics Letters 120 (17), 2022
122022
Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
A Ding, M Reusch, Y Lu, N Kurz, R Lozar, T Christoph, R Driad, ...
2018 IEEE International Ultrasonics Symposium (IUS), 1-9, 2018
122018
Non-Polar a-plane AlScN() Thin Film Based SAW Resonators with Significantly Improved Electromechanical Coupling
A Ding, R Driad, Y Lu, NM Feil, L Kirste, T Christoph, O Ambacher, ...
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
42020
Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators
A Ding, N Kurz, R Driad, Y Lu, R Lozar, T Christoph, L Kirste, O Ambacher, ...
2019 IEEE International Ultrasonics Symposium (IUS), 710-715, 2019
12019
Direct deposition of polycrystalline CdTe films on the Medipix readout chip and evaluation of layer quality and imaging results
A Vogt, S Schütt, F Fischer, C Disch, S Procz, Y Lu, M Fiederle
2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC …, 2014
12014
Elastic Modulus and Coefficient of Thermal Expansion of Piezoelectric Al1− xScxN (up to X
Y Lu, M Reusch, N Kurz, A Ding, T Christoph, M Prescher, L Kirste, ...
Universität, 2018
2018
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